Dynamic photo stepper dispatching/scheduling in wafer fabrication

IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Volumn , Issue , 2005, Pages 75-79

  Ham, Myoungsoo ^a   Dillard, Frank ^a  

^a Samsung Austin Semiconductor   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MANUFACTURING SCHEDULING; PHOTO AREA;

FABRICATION; MAINTENANCE; OPTIMIZATION; SCHEDULING; SILICON WAFERS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 28744447313     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. R. M. Dabbas and J. W. Fowler, "A New Scheduling Approach Using Combined Dispatching Criteria in Wafer Fabs," IEEE Trans. Semiconduct. Manufact., vol. 16, pp. 501-509, Aug. 2003.
2. Y.-F. Hung and R. C. Leachman, "A Production Planning Methodology for Semiconductor Manufacturing Based on Iterative Simulation and Linear Programming Calculations," IEEE Trans. Semiconduct. Manufact., vol. 9, pp. 257-269, May 1996.
3. J. C. Chen, C.-W. Chen, C.-Y. Tai and J. C. Tyan, "Dynamic state-dependent dispatching for wafer fabrication," Int. J. Prod Res., vol. 42, no. 21, pp. 4547-4562, Nov. 2004.