Melt-segregate-quench programming of electrical fuse

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2005, Pages 347-351

  Sasaki, Takahiko ^a   Otsuka, Nobuaki ^a   Hisano, Katsumi ^a   Fujii, Shuso ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Electrical fuse; Electromigration; Melt Segregate Quench; Memory; Nonvolatile; Self agglomeration

Indexed keywords

90 NM TECHNOLOGY; MELT-SEGREGATE-QUENCH; NONVOLATILE; SELF-AGGLOMERATION;

AGGLOMERATION; ELECTRIC CURRENTS; ELECTROMIGRATION; MELTING; NONVOLATILE STORAGE; QUENCHING; THERMAL CONDUCTIVITY;

ELECTRIC FUSES;

EID: 28744447130     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. M. Alavi et al., "APROM Element Based on Salicide Agglomeration of Poly Fuse in a CMOS Logic Proces," in IEDM Tech. Dig., 1997, pp. 855-858.
2. C. Kothandaraman et al., "Electrically Programmable Fuse (eFuse) Using Electromigration in Silicides," in IEEE Electron Device Lett., vol.23, 2002, pp. 523-525.
3. P. S. Ho, "Electromigration and Soret Effect in Cobalt," in J. Phys. Chem. Solids., vol. 27, 1966, 1331-1338.