A usable concept for the indentation of thin porous films

Zeitschrift fuer Metallkunde/Materials Research and Advanced Techniques

Volumn 96, Issue 11, 2005, Pages 1272-1277

  Puschmann, René ^a   Schwarzer, Norbert ^a   Richter, Frank ^a   Frühauf, Swantje ^a   Schulz, Stefan E ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Indentation measurement; Mechanical properties; Porous low k materials; Von Mises stress; Xerogel

Indexed keywords

DEFORMATION; EXTRAPOLATION; INDENTATION; MECHANICAL PROPERTIES; POROUS MATERIALS; POROUS SILICON; YIELD STRESS;

INDENTATION MEASUREMENTS; VON MISES STRESS; XEROGEL;

THIN FILMS;

EID: 28644449145     PISSN: 00443093     EISSN: None     Source Type: Journal    
DOI: 10.3139/146.101174     Document Type: Conference Paper

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