Adaptive control of multiple product processes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4182, Issue 1, 2000, Pages 22-30

  Pasadyn, Alexander J ^a,b   Toprac, Anthony J ^a   Edgar, Thomas F ^b  

^a ADVANCED MICRO DEVICES   (United States)

^b UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

Adaptive contro; Chemical mechanical Planarization; Run to run control

Indexed keywords

MATHEMATICAL MODELS; MICROELECTRONIC PROCESSING; PARAMETER ESTIMATION; PROCESS CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE;

CHEMICAL MECHANICAL PLANARIZATION; RUN TO RUN CONTROL;

ADAPTIVE CONTROL SYSTEMS;

EID: 0034538520     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.410070     Document Type: Article

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