Obtaining mechanical parameters for metallisation stress sensor design using nanoindentation

Zeitschrift fuer Metallkunde/Materials Research and Advanced Techniques

Volumn 96, Issue 11, 2005, Pages 1262-1266

  Soare, S ^a   Bull, S J ^a   Oila, A ^a   O'Neill, A G ^a   Wright, N G ^a   Horsfall, A ^a   Dos Santos, J M M ^a  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

Creep; Finite element analysis; Metallisation; Nanoindentation

Indexed keywords

CREEP; FINITE ELEMENT METHOD; INDENTATION; MECHANICAL PROPERTIES; METALLIZING; SILICON COMPOUNDS; STRESS ANALYSIS;

MECHANICAL PARAMETERS; NANOINDENTATION;

ALUMINUM;

EID: 28644439318     PISSN: 00443093     EISSN: None     Source Type: Journal    
DOI: 10.3139/146.101172     Document Type: Conference Paper

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