Analysis of plasma and neutral gas flow inside of a PET bottle under PIII condition by particle-in-cell/Monte Carlo simulation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 242, Issue 1-2, 2006, Pages 341-345

  Miyagawa, Y ^a   Tanaka, M ^b   Ikeyama, M ^a   Nakao, S ^a   Choi, J ^a   Miyagawa, S ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b PEGASUS Software Inc   (Japan)

Author keywords

Bottle inner coating; PBII; PIC MCC simulation; PIII; Plasma processing

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; ELECTRIC POTENTIAL; ELECTRONS; ION IMPLANTATION; MONTE CARLO METHODS; PLASMAS;

BOTTLE INNER COATING; PBII; PIC-MCC SIMULATION; PIII; PLASMA PROCESSING;

POLYETHYLENE TEREPHTHALATES;

EID: 28544436519     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.08.049     Document Type: Conference Paper

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