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Volumn 24, Issue 3-4, 2001, Pages 79-91

Experimental and numerical investigation of a capacitively coupled low-radio frequency nitrogen plasma

Author keywords

Non equilibrium plasma; Polymer films

Indexed keywords

CATHODES; COMPUTER SIMULATION; ELECTRODES; ELECTRON EMISSION; IONIZATION; LIGHT EMISSION; NITROGEN; POLYMERS; SURFACE TREATMENT;

EID: 0035330608     PISSN: 08941777     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0894-1777(01)00040-1     Document Type: Article
Times cited : (22)

References (44)
  • 17
    • 0004721682 scopus 로고
    • Eastman Kodak Company, Private communication
    • (1994)
    • Glocker, D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.