|
Volumn 24, Issue 3-4, 2001, Pages 79-91
|
Experimental and numerical investigation of a capacitively coupled low-radio frequency nitrogen plasma
|
Author keywords
Non equilibrium plasma; Polymer films
|
Indexed keywords
CATHODES;
COMPUTER SIMULATION;
ELECTRODES;
ELECTRON EMISSION;
IONIZATION;
LIGHT EMISSION;
NITROGEN;
POLYMERS;
SURFACE TREATMENT;
LOW-RADIO FREQUENCY NITROGEN PLASMA;
OPTICAL EMISSION SPECTRA (OES);
FLUID MECHANICS;
POLYMER;
|
EID: 0035330608
PISSN: 08941777
EISSN: None
Source Type: Journal
DOI: 10.1016/S0894-1777(01)00040-1 Document Type: Article |
Times cited : (22)
|
References (44)
|