First-principles calculation of free Si(100) surface impurity enrichment

Applied Physics Letters

Volumn 87, Issue 23, 2005, Pages 1-3

  Centoni, Scott A ^a   Sadigh, Babak ^b   Gilmer, George H ^b   De La Rubia, Tomás Díaz ^b   Musgrave, Charles B ^c  

^a SAN JOSE STATE UNIVERSITY   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^c Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYBRIDIZATION; POTENTIAL ENERGY SURFACE; SURFACE IMPURITY ENRICHMENT;

ARSENIC; BORON; CONCENTRATION (PROCESS); CRYSTAL ATOMIC STRUCTURE; CRYSTAL ORIENTATION; SILICON; SOLUBILITY;

CRYSTAL GROWTH;

EID: 28444490674     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2138811     Document Type: Article

References (20)

1. Physics of Group IV Elements and III-V Compounds, Landolt-Börnstein, edited by, O. Madelung, (Springer, Berlin, 1982), new series ii edition.
2. H. J. Osten, M. Methfessel, G. Lipper, and H. Rücker, Phys. Rev. B 52, 12179 (1995).
3. H. Rücker, M. Methfessel, E. Bugiel, and H. J. Osten, Phys. Rev. Lett. 72, 3578 (1994).
4. J. Tersoff, Phys. Rev. Lett. 74, 5080 (1995).
5. H. J. W. Zandvliet, Rev. Mod. Phys. 72, 593 (2000).
6. C.-L. Liu, L. Borucki, T. Merchant, M. Stoker, and A. Korkin, Phys. Rev. B 62, 5021 (2000).
7. I. N. Remediakis, E. Kaxiras, and P. C. Kelires, Phys. Rev. Lett. 86, 4556 (2001).
8. P. Sonnet, L. Stauffer, A. Selloni, A. De Vita, R. Car, L. Simon, M. Stoffel, and L. Kubler, Phys. Rev. B 62, 6881 (2000).
9. P. C. Kelires and J. Tersoff, Phys. Rev. Lett. 63, 1164 (1989).
10. M. Ramamoorthy, E. L. Briggs, and J. Bernholc, Phys. Rev. B 59, 4813 (1999).
11. S. B. Zhang and A. Zunger, Appl. Phys. Lett. 71, 677 (1997).
12. M. Ramamoorthy, E. L. Briggs, and J. Bernholc, Phys. Rev. Lett. 81, 1642 (1998).
13. G. Kresse and J. Furthmüller, Comput. Mater. Sci. 6, 15 (1996).
14. G. Kresse and J. Furthmüller, Phys. Rev. B 54, 11169 (1996).
15. G. Kresse and J. Hafner, Phys. Rev. B 47, R558 (1993).
16. G. Kresse and J. Hafner, J. Phys.: Condens. Matter 6, 8245 (1994).
17. T. Walther, C. J. Humphreys, and A. G. Cullis, Appl. Phys. Lett. 71, 809 (1997).
18. Y. Yang and R. J. Hamers, Appl. Phys. Lett. 56, 2057 (1995).
19. R. L. Headrick, B. E. Weir, A. F. Levi, D. J. Eaglesham, and L. C. Feldman, Appl. Phys. Lett. 57, 2779 (1990).
20. M. Copel, M. C. Reuter, E. Kaxiras, and R. M. Tromp, Phys. Rev. B 63, 632 (1989).