Absolute calibration of extreme ultraviolet optical components with an x-ray-induced fluorescence source

Review of Scientific Instruments

Volumn 76, Issue 11, 2005, Pages 1-4

  Ueda, Nobuyoshi ^a   Nishimura, Hiroaki ^a   Fujioka, Shinsuke ^a   Miyanaga, Noriaki ^a   Izawa, Yasukazu ^a   Uegaki, Junya ^b   Shimizu, Kazuaki ^b   Yamada, Takashi ^b  

^a OSAKA UNIVERSITY   (Japan)

^b Rigaku Industrial Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; DIFFRACTION GRATINGS; FLUORESCENCE; LIGHT TRANSMISSION; MATHEMATICAL MODELS; X RAY ANALYSIS;

DEVICE DETECTORS; GRAZING INCIDENCE; OPTICAL COMPONENTS; SOURCE MATERIALS;

ULTRAVIOLET RADIATION;

EID: 28444474588     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2135287     Document Type: Review

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