Effect of wall reflection on the determination of electron temperature by the line-ratio method in inductively coupled plasmas

Physics of Plasmas

Volumn 12, Issue 11, 2005, Pages 1-3

  Pu, Yi Kang ^a   Yu, Zhen Dong ^a   Guo, Zhi Gang ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC INDUCTORS; ELECTRONS; ERROR ANALYSIS; REFLECTION;

ELECTRON TEMPERATURE; LINE-RATIO METHOD; WALL REFLECTION; WALL REFLECTIVITY;

INDUCTIVELY COUPLED PLASMA;

EID: 28444458132     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2124527     Document Type: Article

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