Polymeric helices with submicron dimensions for MEMS devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5836, Issue , 2005, Pages 41-55

  Elias, Anastasia L ^a   Harris, Kenneth D ^b   Bastiaansen, Cees W M ^b   Broer, Dirk J ^b,c   Brett, Michael J ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Glancing angle deposition; Liquid crystalline polymers; MEMS; Microfabrication

Indexed keywords

BIREFRINGENCE; CROSSLINKING; HEATING; LIQUID CRYSTAL POLYMERS; SCANNING ELECTRON MICROSCOPY; THERMAL EFFECTS;

GLANCING ANGLE DEPOSITION; MEMS; MICROFABRICATION; ROOM TEMPERATURE;

MICROELECTROMECHANICAL DEVICES;

EID: 28344451160     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.608584     Document Type: Conference Paper

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