Efficient topology and design methodology for RF MEMS switches

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5836, Issue , 2005, Pages 535-539

  Ducarouge, B ^a   Dubuc, D ^a   Melle S ^a   Grenier, K ^a   Mazenq, L ^a   Bary, L ^a   Plana, R ^a  

^a LAAS CNRS   (France)

Author keywords

Design methodology; Power capabilities; RF MEMS; Switch

Indexed keywords

ELECTRIC SWITCHES; MICROWAVES; OPTIMIZATION; TOPOLOGY;

DESIGN METHODOLOGY; POWER CAPABILITIES; RF-MEMS; SWITCH;

MICROELECTROMECHANICAL DEVICES;

EID: 28344440549     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.609396     Document Type: Conference Paper

References (5)

1. G. M. Rebeiz "RF MEMS, Theory, Design and Technology", Chap. 1.5 "Case Studies in RF MEMS", pp. 6-14, by John Willey & Sons, 2003.
2. N. Rolland, L. Buchaillot, P. Legris-Lefebvre, P.A. Rolland, "Micro-commutateurs à faible perte en gamme millimétrique (MEMS)", XIIth National Microwaves Days, may 2002.
3. J.B. Muldavin, G.M. Rebeiz, "High-isolation CPW MEMS shunt switches-Part 1 : Modeling ", IEEE MTT, Vol. 48, no 6, pp. 1045-1052, 2000.
4. K.Grenier, "Conception, réalisation et caractérisation de structures micro-usinées sur silicium: applications aux microsystèmes millimétriques", Ph.D. dissertation, LAAS CNRS, Toulouse, France, 2000.
5. J. B. Rizk, E. Chaiban, G.M. Rebeiz, "Steady State Thermal Analysis and High Power Reliability Considerations of RF MEMS Capacitive Switches", IEEE MTT-S Int. Microwave Symp. Dig., pp. 239-242, 2002.