Surface Acoustic Waves as a technique for in-line detection of processing damage to low-k dielectrics

Proceedings of the IEEE 2005 International Interconnect Technology Conference, IITC

Volumn , Issue , 2005, Pages 217-219

  Iacopi, F ^a   Brongersma, S H ^a   Mazurenko, A ^b   Struyf, H ^a   Mannaert, G ^a   Travaly, Y ^a   Maznev, A ^b   Abell, T J ^c   Tower, J ^b   Maex, K ^a,d  

^a IMEC   (Belgium)

^b PHILIPS RESEARCH LABORATORIES   (Germany)

^c INTEL CORPORATION   (United States)

^d UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC DAMAGE; LOW-K DIELECTRICS; SURFACE ACOUSTIC WAVES;

DIELECTRIC MATERIALS; FAILURE ANALYSIS; MODIFICATION; PLASMAS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 28244492753     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. F.Iacopi, K.Maex, M.Stucchi, O.Richard, Electrochemical and Solid State Letters 7 (4), G79-G82, 2004.
2. J.A.Rogers, A.Maznev, M.J.Banet, K.A.Nelson, Annu.Rev.Mater.Sci. 30, pp.117-157, 2000
3. G.W.Farnell, E.L.Adler, in Physical Acoustics IX, Academic Press, 1972