Investigation of properties of thin oxide films SnOx annealed in various atmospheres

Thin Solid Films

Volumn 495, Issue 1-2, 2006, Pages 316-320

  Mukhamedshina, D M ^a   Beisenkhanov, N B ^a   Mit', K A ^a   Valitova, I V ^a   Botvin, V A ^a  

^a INSTITUTE OF PHYSICS AND TECHNOLOGY   (Kazakhstan)

Author keywords

Annealing; Magnetron sputtering method; Tin dioxide; Various atmospheres

Indexed keywords

ANNEALING; CORRELATION METHODS; DEPOSITION; GLASS; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SUBSTRATES; TIN COMPOUNDS;

GLASS SUBSTRATES; MAGNETRON SPUTTERING METHOD; TIN DIOXIDE; VARIOUS ATMOSPHERE;

THIN FILMS;

EID: 28044465758     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.293     Document Type: Conference Paper

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