Effect of sputtering power on surface topography and mechanical properties of GeSb2Te4 phase-change films

Jiangsu Daxue Xuebao (Ziran Kexue Ban) / Journal of Jiangsu University (Natural Science Edition)

Volumn 26, Issue 5, 2005, Pages 372-375

  Ding, Jian Ning ^a   Xie, Guo Xin ^a   Fan, Zhen ^a   Fu, Yong Zhong ^a   Yang, Ji Chang ^a   Ge, Shi Rong ^b  

^a JIANGSU UNIVERSITY   (China)

^b CHINA UNIVERSITY OF MINING AND TECHNOLOGY   (China)

Author keywords

Friction; GeSb2Te4 film; Nanoindention; RF magnetron sputtering; Surface topography

Indexed keywords

AMORPHOUS MATERIALS; ANTIMONY COMPOUNDS; ATOMIC FORCE MICROSCOPY; FRICTION; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; SURFACE TOPOGRAPHY; TELLURIUM COMPOUNDS;

NANOINDENTION; RF MAGNETRON SPUTTERING; SPUTTERING POWER;

GERMANIUM COMPOUNDS;

EID: 27944506127     PISSN: 16717775     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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