Coating tips used in electrical scanning probe microscopy with W and AuPd

Applied Surface Science

Volumn 252, Issue 5, 2005, Pages 2085-2091

  Huang, H S ^a   Cheng, H M ^a   Lin, L J ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Conductive film; Scanning probe microscopy; Wear resistance

Indexed keywords

CONDUCTIVE FILMS; GOLD COMPOUNDS; OXIDES; SILICON; WEAR RESISTANCE;

OXIDE FORMATION; SCANNING PROBE MICROSCOPY (SPM); SILICON CANTILEVER;

COATING TECHNIQUES;

EID: 27944472742     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.03.208     Document Type: Article

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