Novel infrared absorbing material coupled uncooled microbolometer

Proceedings of IEEE Sensors

Volumn 2, Issue , 2004, Pages 658-660

  Moon, Sung ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

Microbolometer; TCR; Vanadium Tungsten Oxide

Indexed keywords

INFRARED RADIATION; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; OXIDATION; TUNGSTEN ALLOYS; VANADIUM ALLOYS;

BOLOMETRIC MATERIALS; MICROBOLOMETER; TCR; VANADIUM-TUNGSTEN OXIDE;

BOLOMETERS;

EID: 27944457614     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. E.L. Dereniak and G.D. Boreman, Infrared Detectors and Systems, John Wiley and Sons, 1996.
2. A. Tanaka, S. Matsumoto, et. al, IEEE Transactions on Electron Devices, Vol. 43, p. 1844, 1996.
3. H. Jerominek, F. Picard, Proceedings of SPIE, Vol. 2746, p. 60, 1996
4. A. Jahanzeb, C.M. Travers, Z. Celik-Butler, D.P. Butler, and S.G. Tan, IEEE Transactions on Electron Devices, Vol. 44, p. 1975, 1996.
5. Xingjian Yi, Changhong Chen, et al, A new fabrication method for vanadium dioxide thin films deposited by ion beam sputtering, Infrared Physics and Technology, Vol. 44, pp. 137-141, 2003.
6. R T Rajendra Kumar, B Karunagaran, et. al, Study of a pulsed laser deposited vanadium oxide based microbolometer array, Smart Mater. Struct. Vol. 12, pp. 188-192, 2003.