An inertial-grade laterally-driven MEMS differential resonant accelerometer

Proceedings of IEEE Sensors

Volumn 2, Issue , 2004, Pages 654-657

  Seok, Seonho ^a   Kim, Hak ^a   Chun, Kukjin ^a  

^a Seoul National University   (South Korea)

Author keywords

Accelerometer; Inertial; Laterally; Resonant

Indexed keywords

ACCELEROMETERS; CRYSTALLINE MATERIALS; MICROMACHINING; RESONANCE; SILICON; STIFFNESS; VIBRATIONS (MECHANICAL);

ELECTROSTATIC STIFFNESS; INERTIAL; LATERALLY; RESONANT;

MICROELECTROMECHANICAL DEVICES;

EID: 27944436634     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. D. W. Burns, R. D. Horning, W. R. Herb, J. D. Zook, and H. Guckel, "Resonant microbeam accelerometer," The 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX (Transducers '95), Stockholm, Sweden, June 25-29, 1995, pp.659-662.
2. T. V. Rozhart, H. Jerman, J. Drake, and C. de Cotiis,"An inertial-grade, micromachined vibrating beam accelerometer, "The 8th International Conference on Solid-State Transducers and Actuators, and Eurosensors IX (Transducers '95), Stockholm, Sweden, June 25-29, 1995, pp.656-658.
3. M. Helsel, G. Gassner, M. Robinson and J. Woodruff, "A Navigation Grade Micro-Machined Silicon Accelerometer," IEEE Position Location and Navigation Symposium, April 11-15, 1994, pp.51-58.
4. B. L. Lee, C. H. Oh, Y. S. Oh, and K. Chun, "A Novel Resonant Accelerometer: Electrostatic Stiffness Type", The 10th International Conference on Solid State Sensors and Actuators (Transducer '99), Sendai, Japan, June 7-10, 1999, pp. 1546-1549.
5. A. A. Seshia, M. Palaniapan, T. A. Roessig, R. T. Howe, R. W. Gooch, T. R. Schimert, and S. Montague, "A Vacuum Packaged Surface Micromachined Resonant Accelerometer," Journal of Microelectromechanical systems, Vol. 11, No. 6, Dec. 2002, pp.784-793.
6. K. H. Han and Y. H. Cho, "Self-balanced High-resolution Capacitive Microaccelerometers using Branched Finger Electrodes with High-amplitude Sense Voltage," IEEE the 5th Annual International Conference on Micro Electro Mechanical System (MEMS '02), Las Vegas, Nevada, USA, Jan. 20-24, 2002, pp.714-717.