Self-balanced high-resolution capacitive microaccelerometers using branched finger electrodes with high-amplitude sense voltage

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 714-717

  Han, Ki Ho ^a   Cho, Young Ho ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; ELECTRODES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SPURIOUS SIGNAL NOISE;

BRANCHED FINGER ELECTRODES; DEEP REACTIVE ION ETCHING; HIGH AMPLITUDE SENSE VOLTAGE; MICROACCELEROMETERS;

ACCELEROMETERS;

EID: 0036122191     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. An integrated force-balanced capacitive accelerometer for low-g applications
2. Accelerometer sensors in surface micromachining for airbag applications with high signal/noise ratio
3. Navigation grade silicon accelerometer with sacrificially etched SIMOX and BESOI structure
4. A high sensitivity capacitive microaccelerometer with a folded-electrode structure
5. A low-noise digital accelerometer using integrated SOI-MEMS technology
6. A surface micromachined silicon accelerometer with on-chip detection circuitry