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Volumn 98, Issue 9, 2005, Pages

Characteristics of a low-frequency-driven ferroinductor-coupled discharge

Author keywords

[No Author keywords available]

Indexed keywords

INDUCTIVELY COUPLED DISCHARGE; RF ANTENNA; WINDING LOSSES;

EID: 27844602972     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2128474     Document Type: Article
Times cited : (5)

References (10)
  • 5
    • 0035418087 scopus 로고    scopus 로고
    • APS Conference Abstracts, 52nd Gaseous Electronics Conference, Norfolk, VA
    • V. Godyak, in APS Conference Abstracts, 52nd Gaseous Electronics Conference, Norfolk, VA, 1999 (unpublished), Abstract No. AT2.02; V. Godyak, R. Piejak, B. Alexandrovich, and A. Smolyakov, Plasma Sources Sci. Technol. 10, 459 (2001), and references therein.
    • (1999)
    • Godyak, V.1
  • 9
    • 0033554954 scopus 로고    scopus 로고
    • V. P. Denisov, V. A. Isaev, V. N. Kruglov, and G. V. Permitin, Sov. J. Plasma Phys. 0360-0343 10, 486 (1984); V. Godyak, R. B. Piejak, and B. M. Alexandrovich, J. Appl. Phys. 85, 703 (1999), and references therein.
    • (1999) J. Appl. Phys. , vol.85 , pp. 703
    • Godyak, V.1    Piejak, R.B.2    Alexandrovich, B.M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.