CO2 laser processing of alumina (Al2O3) printed circuit board substrates

IEEE Transactions on Electronics Packaging Manufacturing

Volumn 28, Issue 3, 2005, Pages 249-258

  Moorhouse, Colin J ^a   Villarreal, Francisco ^a   Wendland, Jozef J ^a,b   Baker, Howard J ^a   Hall, Denis R ^a   Hand, Duncan P ^a  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

^b Powerlase Ltd   (United Kingdom)

Author keywords

Alumina laser processing; Enhanced peak power CO2 laser; High speed videography; Melt ejection; Plasma screening

Indexed keywords

ALUMINA; CARBON DIOXIDE LASERS; LASER BEAM EFFECTS; LASER PULSES; PLASMAS; SUBSTRATES;

ALUMINA LASER PROCESSING; ENHANCED PEAK POWER CARBON DIOXIDE LASER; HIGH SPEED VIDEOGRAPHY; PLASMA SCREENING;

PRINTED CIRCUIT BOARDS;

EID: 27844602127     PISSN: 1521334X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TEPM.2005.852232     Document Type: Article

References (26)

1. 2 waveguide laser materials," Appl. Opt., vol. 31, pp. 4175-4181, 1992.
2. J. H. Zhang, T. C. Lee, X. Ai, and W. S. Lau, "Investigation of the surface integrity of laser-cut ceramic," J. Mater. Process. Technol., vol. 57, pp. 304-310, 1996.
3. D. H. Schroeder and F. L. English, "A comparison of the strength of alumina substrates for different separation techniques," IEEE Trans. Parts, Hybrids Packag., vol. PHP-8, no. 3, pp. 4-6, Sep. 1972.
4. 2 laser," Ceramic Bull., vol. 50, pp. 251-253, 1971.
5. 3 scribing," Ceramic Bull., vol. 54, pp. 986-989, 1975.
6. 2 laser beam," in Proc. SPIE, vol. 4830, 2002, pp. 424-428.
7. 2 lasers," Appl. Phys. Lett., vol. 78, pp. 2276-2278, 2001.
8. F. Villarreal, Q. Cao, R. J. Ramirez, H. J. Baker, and D. R. Hall, "High gain and high peak power in planar waveguide lasers," in Proc. CLEO Pacific Rim, vol. 1, 2001, pp. I 220-I 221
9. 2 laser for corrosion resistance improvement," J. Laser Applications, vol. 15, pp. 233-239, 2003.
10. 2 laser," in Proc. SPIE, vol. 5339, 2004, pp. 276-283.
11. H. S. Carslaw and J. C. Jaeger, Conduction of Heat in Solids. Oxford, U.K.: Clarendon, 1959.
12. 2-1aser," in Proc. SPIE, vol. 801, 1987, pp. 283-287.
13. C. Hamann and H. G. Rosen, "Laser machining of ceramic and silicon," in Proc. SPIE, vol. 801, 1987, pp. 130-137.
14. B. Medres, L., Shepeleva, W. D. Kaplan, and M. Bamberger, "The effectiveness of laser plasma material processes," Lasers Eng., vol. 9, pp. 205-214, 1999.
15. S. Sankaranarayanan, H. Emminger, and A. Kar, "Energy loss in the plasma during laser drilling," J. Appl. Phys. D, vol. 32, pp. 1605-1611, 1999.
16. D. Breitling, H. Schittenhelm, P. Berger, F. Dausinger, and H. Hügel, "Shadowgraphic and interferometric investigations on Nd:YAG laser-induced vapor/plasma plumes for different processing wavelengths," Appl. Phys. A, vol. 69, pp. S505-S508, 1999.
17. M. von Allmen and A. Blatter, Laser-Beam Interactions With Materials: Physical Principles and Applications. Berlin, Germany: Springer, 1987.
18. R. L. Stegman, J. T. Schriempf, and L. R. Hettche, "Experimental studies of laser-supported absorption waves with 5-ms pulses of 10.6-μ radiation," J. Appl. Phys., vol. 44, pp. 3675-3681, 1973.
19. D. E. Lencioni, "The effect of dust on 10.6-μm laser-induced air breakdown," Appl. Phys. Letters, vol. 23, pp. 12-14, 1973.
20. 3 ceramic substrates," J. Appl. Phys., vol. 70, pp. 75-81, 1991.
21. 2 laser radiation," Appl. Surface Sci., vol. 96-98, pp. 3944, 1996.
22. 3 targets," Appl. Phys. A, vol. 79, pp. 1291-1294, 2004.
23. F. P. Gagliano and U. C. Paek, "Observation of laser-induced explosion of solid materials and correlation with theory," Appl. Opt., vol. 13, pp. 274-279, 1974.
24. F. Villarreal, K. Gulia, H. J. Baker, D. P. Hand, and D. R. Hall, "High speed videography of microvia formation and melt ejection," in Proc. ICALEO, 2002. LIA PUB594.
25. 2 laser," in Proc. ICALEO, vol. 75, 1992, pp. 459-468.
26. S. M. Metev and V. P. Veiko, Laser-Assisted Micro-Technology. New York: Springer, 1994.