Positron annihilation studies of high dose Sb implanted silicon

Materials Science and Engineering: B

Volumn 124-125, Issue SUPPL., 2005, Pages 283-287

  Schut, H ^a   Eijt, S W H ^a   Beling, C D ^b   Ho, K ^b   Takamura, Y ^c  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b UNIVERSITY OF HONG KONG   (Hong Kong)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Antimony; Electrical deactivation; Ion implantation; Laser annealing; Positron annihilation; Precipitates

Indexed keywords

AMORPHIZATION; ANNEALING; ANTIMONY; CORRELATION METHODS; DOPPLER EFFECT; ION IMPLANTATION; POSITRON ANNIHILATION SPECTROSCOPY; PRECIPITATION (CHEMICAL);

ELECTRICAL DEACTIVATION; LASER ANNEALING; POSITRON ANNIHILATION; PRECIPITATES;

SILICON;

EID: 27844584710     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2005.08.011     Document Type: Conference Paper

References (13)

1. International Technology Roadmap for Semiconductors (ITRS) 2001 and 2003.
2. Y. Takamura, A. Vaillionis, A.F. Marshall, P.B. Griffin, and J.D. Plummer J. Appl. Phys. 92 2002 5503
3. Y. Takamura, P.B. Griffin, and J.D. Plummer J. Appl. Phys. 92 2002 235
4. Y. Takamura, P.B. Griffin, and J.D. Plummer J. Appl. Phys. 92 2002 230
5. Y. Takamura, A.F. Marshall, A. Mehta, J. Arthur, P.B. Griffin, J.D. Plummer, and J.R. Patel J. Appl. Phys. 95 2004 3968
6. R. Krause-Rehberg, and H.S. Leipner Positron Annihilation in Semi-conductors: Defect Studies first ed. 1999 Springer Verlag Berlin, Heidelberg, New York
7. S. Szapala, P. Asoka Kumar, B. Nielsen, J.P. Peng, S. Hayakawa, K.G. Lynn, and H.-J. Gossmann Phys. Rev. B 54 1996 4722
8. M. Alatalo, B. Barbellieni, M. Hakala, H. Kauppinen, T. Korhonen, M.J. Puska, K. Saarinen, P. Hautojärvi, and R.M. Nieminen Phys. Rev. B 54 1996 2397
9. P.E. Mijnarends, and A. Bansil A. Dupasquier A.P. Mills Jr. Positron Spectroscopy of Solids 1995 IOS Press Amsterdam 25
10. A. van Veen, H. Schut, J. de Vries, R.A. Hakvoort, M. IJpma, in: P.J. Schultz, G.R. Massoumi, P.J. Simpson (Eds.), Positron Beams for Surfaces and Solids, AIP Conference Proceedings, vol. 218, New York, 1991.
11. M. Hasegwa, A. Kawasuso, T. Chiba, T. Akahane, and M. Suezawa Appl. Phys. A61 1995 65
12. P.J. Simpson, P.J. Schultz, T.E. Jackman, G.C. Aers, J.P. Noël, D.C. Houghton, D.D. Perovic, G.C Weatherly, in: P.J. Schultz, G.R. Massoumi, P.J. Simpson (Eds.), Positron Beams for Surfaces and Solids, AIP Conference Proceedings, vol. 218, New York, 1991.
13. J. Fage-Pederson, P. Gaiduk, J. Lundsgaard Hansen, and A. Nylandsted Larsen J. Appl. Phys. 88 2002 3254