Modeling and identification of an electrostatic motor

Precision Engineering

Volumn 30, Issue 1, 2006, Pages 104-113

  Yamamoto, Akio ^a   Niino, Toshiki ^b   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Actuator; Electrostatic motor; Modeling; Parameter identification; Ripple reduction; Skew

Indexed keywords

ACTUATORS; CAPACITANCE; COMPUTER SIMULATION; ELECTRODES; IDENTIFICATION (CONTROL SYSTEMS); MATHEMATICAL MODELS; MATRIX ALGEBRA; SYNCHRONOUS MOTORS;

ELECTROSTATIC MOTOR; MODELING; RIPPLE REDUCTION; SKEW;

ELECTRIC MOTORS;

EID: 27844543708     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2005.06.004     Document Type: Article

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