High precision electrostatic actuator with novel electrode design

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 408-413

  Yamamoto, Akio ^a   Niino, Toshiki ^a   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROLLABILITY; ELECTRIC DRIVES; ELECTRODES; ELECTROSTATIC DEVICES; MOTION CONTROL;

ELECTROSTATIC ACTUATORS;

ACTUATORS;

EID: 0031654020     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)