Multiparametric chemical sensor based on nanocrystalline silicon waveguide

Sensor Letters

Volumn 3, Issue 2, 2005, Pages 117-125

  Lysenko, S I ^a   Kaganovich, E B ^a   Kizyak, I M ^a   Snopok, B A ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

Author keywords

Chemical sensors; Guided optical waves; Light scattering; Nanocrystalline silicon; Pulsed laser deposition

Indexed keywords

ADSORPTION; CONDENSATION; LIGHT SCATTERING; NANOSTRUCTURED MATERIALS; OPTICAL SENSORS; OPTICAL WAVEGUIDES; PULSED LASER DEPOSITION; SILICON SENSORS; SPECTROSCOPY; THIN FILMS;

GUIDED OPTICAL WAVES; MULTIPARAMETRIC CHEMICAL SENSOR; NANOCRYSTALLINE SILICON WAVEGUIDE; WAVEGUIDE SPECTROSCOPY;

CHEMICAL SENSORS;

EID: 27844462583     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2005.025     Document Type: Article

References (63)

1. Sensors for Environmental Control, edited by P. Siciliano, World Scientific Publishing, New Jersey (2003).
2. Encyclopedia of Sensors, edited by C. A. Grimes and El. C. Dickey, The Pennsylvania State University, University Park, USA (2004).
3. P. Roura, J. Costa, J. R. Morante, and E. Bertan, J. Appl. Phys. 81, 3290 (1997).
4. C. F. Bohren and D. R. Huffman, Absorption and Scattering of Light by Small Particles, Wiley, New York (1983).
5. V. A. Sterligov, P. Cheyssac, R. Kofman, S. I. Lysenko, P. M. Lytvyn, B. Vohnsen, S. I. Bozhevolnyi, and A. A. Maradudin, Phys. Stat. Sol. (B) 229, 1283 (2002).
6. V. A. Sterligov, P. Cheyssac, S. I. Lysenko, and R. Kofman, Optics Communications 186, 27 (2000).
7. Y. Kanemitsu, Phys. Reports 263 (1995).
8. A. G. Cullis, L. T. Canham, and P. D. J. Calcott, J. Appl. Phys. 82, 909 (1997).
9. O. Bisi, S. Ossicini, and L. Pavesi, Surf Science Rep. 38, 1 (2000).
10. D. Thevenot, K. Toth, R. Durst, and G. Wilson, Pure Apll. Chem. 71, 2333 (1999).
11. V. M. Agranovich and D. L. Mills, Surface Polaritons. Electromagnetic waves at Surface and Interfaces, North-Holland Publishing Company (1982).
12. S. Ekgasit, C. Thammacharoen, and W. Knoll, Anal. Chem. 76, 561 (2004).
13. S. Ekgasit, C. Thammacharoen, F. Yu, and W. Knoll, Anal. Chem. 76, 2210 (2004)
14. Z. Salamon, M. Brown, and G. Tollin, Trends in Biochemical Sciences 24, 213 (1999).
15. H. C. van de Hulst, Light Scattering by Small Particles, Dover, New York (1981).
16. W. Gopel, Sens. Actuators B18-19, 1 (1994).
17. M. Ben-Chorin and A. Kux, Appl. Phys. Lett. 64, 481 (1994)
18. H. Min, H. Yang, and S. M. Cho, Sens. Actuators B67, 199 (2000).
19. C. Baratto, G. Faglia, G. Sberveglieri, Z. Gaburro, L. Pancheri, C. Oton, and L. Pavesi, 2, 121 (2002).
20. R. C. Anderson, R. S. Muller, and C. W. Tobias, Sens. Actuators A21-23, 835 (1990).
21. M. B. Ali, R. Milka, H. B. Ouada, R. M'ghaieth, and H. Maaref, Sens. Actuators 74, 123 (1999).
22. D. I. Bilenko, O. Ya. Belobrovaja, O. Yu. Coldobanova, E. A. Jarkova, E. I. Khasina, V. P. Polyanskaya, T. E. Melnikova, I B. Mysenko, V. V. Smirnov, and G. O. Gilippova, Sens. Actuators 79, 147 (2000).
23. H. F. Arrand, T. M. Benson, A. Loni, R. Arens-Fisher, M. G. Kruger, M. Thoenissen, H. Lueth, S. Kershaw, N. N. Vorozov, J. Luminescence 80, 119 (1999).
24. M. Ben Ali, R. Mlika, H. Ben Ouada, R. M'ghateth, and H. Maaref, Sens. Actuators 74, 123 (1999).
25. Pulsed Laser Deposition of Thin Films, edited by D. B. Chrisey and G. K. Hubler, Wiley and Sons inc., New York (1994).
26. E. G. Manoilov, A. A. Kudryavtsev, S. V. Svechnikov, E. B. Kaganovich, and I. Z. Indutniy, Thin Sol. Films. 349, 298 (1999)
27. E. D. Eugenieva and P. A. Atanasov, Materials Science in Semiconductor Processing 3, 575 (2000).
28. E. B. Kaganovich, E. G. Manoilov, and S. V. Svechnikov, Ukrain. Phys. J. 46, 1196 (2001).
29. J. Homola, Anal. Bioanal. Chem. 377, 528 (2003).
30. W. Knoll, in Handbook of optical properties, V.1, Thin films for optical coatings, edited by. R. E. Hummel, K. H Guenther, CRC Press, Inc. (1997), Chap. 13.
31. H. Raether, Surface plasmons on smooth and rough surfaces and on gratings, Springer-Verlag, Berlin (1985).
32. F. Abeles, in Modern Problems in Condensed Matter Sciences. Surface excitations, edited by Agranovitch, and Maradudin, North-Holland (1984), Vol. 9.
33. S. Ekgasit, F. Yu, and W. Knoll, Sens. Actuators B 104, 294 (2005).
34. E. F. Aust, M. Sawodny, S. Ito, and W. Knoll, Scanning 16, 353 (1994).
35. W. L. Barnes, and J. R. Sambles, Surface Science 177, 399 (1986).
36. Z. Salamon, H. A. Macleod, and G. Tollin, Biochimica et Biophysica Acta. 1331, 117 (1997).
37. R. Srivastava, C. Bao, and C. Gomez-Reino, Sens. Actuators A 51, 165 (1996).
38. L. Wu, Optics Commun. 224, 51 (2003).
39. J. Piehler, A. Brandenburg, A. Brecht, E. Wagner, and G. Gauglitz, Appl. Optics 36, 6554 (1997).
40. G. Stewart, F. A. Muhammad, and B. Culshaw, Sens. Actuators B 11, 521 (1993).
41. C. R. Lavers, K. Itoh, S. C. Wu, M. Murabayashi, I. Mauchline, G. Stewart, and T. Stout, Sens. Actuators B 69, 85 (2000).
42. G. Boisde and A. Harmer, Chemical and Biochemical Sensing with Optical Fibers and Waveguides, Artech House, Boston (1996).
43. A. V. Tomov and A. I. Voitenkov, Optics Commun. 174, 133 (2000).
44. I. Garces, F. Villuendas, I. Salinas, J. Alonso, M. Puyol, C. Dominguez, and A. Llobera, Sens. Actuators B 60, 191 (1999).
45. E. Matveeva, Z. Gryczynski, I. Gryczynski, and J. Lakowicz, J. Immunological Methods 286, 133 (2004).
46. F. F. Volkenshteyn, Electronic processes at the surface of semiconductors under chemosorption, Nauka, Moscow (1987).
47. E. F. Venger, A. B. Goncharenko, S. N. Zavadskij, B. A. Snopok, Yu. V. Ushenin, and Yu. M. Shirshov, Optoelectronic and Semiconductor Techniques 34, 142 (1999).
48. S. Briglin, M. Freund, P. Tokumaru, and N. Lewis, Sens. Actuators B82, 54 (2002).
49. D. E. Aspnes, Thin Solid Films 89, 249 (1982).
50. S. J. Gregg and K. S. W. Sing, Adsorption, Surface Area and Porosity, Academic Press (1967).
51. L. De Stefano, I. Rendina, L. Moretti, S. Tundo, and A. M. Rossi, Appl. Optics 43, 167 (2004).
52. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light, North-Holland publishing company, Amsterdam, New York, Oxford (1977).
53. A. Madan and M. P. Shaw, The Physics and Applications of Amorphous Semiconductors, Academic Press, Boston (1988).
54. V. Yu. Bratus, S. M. Okulov, E. B. Kaganovich, I. M. Kizyak, and E. G. Manoilov, Semiconductors 38, 621 (2004).
55. V. M. Zaitsev, Complexing silica, Kiev (2003).
56. R. K. Schulze and J. F. Evans, Appl. Surf Sci. 81, 449 (1994).
57. A. M. Orlov, B. M. Kostishko, A. V. Sindyaev, S. N. Mikov, O. V. Litvinenko, and I. P. Puzov, Surface 10, 60 (2000).
58. Hand-book of Physical magnitudes, Energoatomizdat, Moscow (1991).
59. U. Kreibig, Optics of Nanosized Metals in Handbook of Optical Properties, edited by R. E. Hummel, and P. Withmann, CRC Press, New York, Vol. II, 145 (1995).
60. A. V. Sachenko, E. B. Kaganovich, E. G. Manoilov, and S. V. Svechnikov, Semiconductors 35, 1383 (2001).
61. O. Peshev, Comp. Rend. Acad. Bulg. Sci. 29, 201 (1976).
62. O. Peshev, Disperced semiconductors in Adsorption and Surface Reactions, Bulg. Acad. Sci. Sofia (1980).
63. B. A. Snopok and I. V. Kruglenko, Thin Solid Films 418, 21 (2002).