Nanopatterned polymer thin films

Journal of Nonlinear Optical Physics and Materials

Volumn 14, Issue 3, 2005, Pages 299-303

  Kee, Chul Sik ^a   Yoon, Keun Byung ^b   Choi, Choon G I ^b   Kim, Jin Tae ^b   Han, Sang Pil ^b   Park, Sunggook ^c   Schift, Helmut ^c  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^c PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

Hot embossing; Nanoimprint lithography; Planar photonic crystals; Polymer thin films

Indexed keywords

NANOIMPRINT LITHOGRAPHY; OPTICAL FILMS; OPTICAL PROPERTIES; SEMICONDUCTING FILMS; THIN FILMS;

HOT EMBOSSING PROCESS; HOT-EMBOSSING; IMPRINTING PROCESS; IMPRINTING TECHNIQUE; PLANAR PHOTONIC CRYSTAL; POLYMER THIN FILMS; SILICON STAMP; TRIANGULAR ARRAYS;

POLYMER FILMS;

EID: 27844441798     PISSN: 02188635     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0218863505002736     Document Type: Article

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