Ablation of metals by ultrashort laser pulses

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5830, Issue , 2005, Pages 80-84

  Nedialkov, N N ^a   Atanasov, P A ^a   Breitling, D ^b   Heusel, G ^b   Dausinger, F ^b  

^a INSTITUTE OF ELECTRONICS   (Bulgaria)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Metals; Ultrashort laser drilling

Indexed keywords

ALUMINUM; COPPER; ENERGY ABSORPTION; LASER ABLATION; MOLTEN MATERIALS; NICKEL; ULTRASHORT PULSES;

ABLATION THRESHOLD; ELECTRON HEAT DIFFUSION; LASER PULSE DURATION;

IRON;

EID: 27744462965     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.617375     Document Type: Conference Paper

References (15)

1. B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tünnermann, "Femtosecond, picosecond and nanosecond laser ablation of solids", Appl. Phys. A 63, 109-115, 1996.
2. S. Preuss, A. Demchuk, M. Stuke, "Sub-picosecond UV laser ablation of metals", Appl. Phys. A 61, 33-37, 1995.
3. X. Zhu, A.Yu. Naumov, D. M. Villeneuve, P.B. Corkum, "Influence of laser parameters and material properties on micro drilling with femtosecond laser pulses", Appl. Phys. A 69, S367-S371, 1999.
4. M.D. Shirk, P.A. Molian, "A review of ultrashort pulsed laser ablation of materials", J. Laser Appl., 10, 18-28, 1998.
5. S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B.N. Chichkov, B. Wellegehausen, H. Welling, "Ablation of metals by ultrashort laser pulses", J. Opt. Soc. Am. B 14, 2716-2722, 1997
6. S.S. Wellershoff, J. Hohlfeld, J. Güdde, E. Matthias, "The role of electron-phonon coupling in femtosecond laser damage of metals", Appl. Phys. A 69, S99-S107, 1999.
7. K. Furusawa, K. Takahashi, H. Kumagai, K. Midorikawa, M. Obara, " Ablation characteristics of Au, Ag, and Cu metals using a femtosecond Ti:sapphire laser", Appl. Phys. A 69, S359-S366, 1999.
8. L.V. Zhigilei, "Dynamics of the plume formation and parameters of the ejected clusters in short-pulse laser ablation", Appl. Phys. A 76, 339, 2003.
9. P.S. Banks, M.D. Feit, A.M. Rubenchik, B.C. Stuart, M.D. Perry, "Material effects in ultra-short pulse laser drilling of metals", Appl. Phys. A 69, 377-380, 1999.
10. A.E. Wynne, B.C. Stuart, "Rate dependence of short-pulse laser ablation of metals in air and vacuum", Appl. Phys. A 76, 373-378, 2003.
11. J.H. Klein-Wiele, G. Marowsky, P. Simon, "Subpicosecond time resolved ablation studies of submicrometer gratings on metals and semiconductors", Appl. Phys. A 69, S187-S190, 1999.
12. K. Dou, E.T. Knobbe, R.L. Parkhill, B. Irwin, L. Matthew, K.H. Church, "Femtosecond study of surface structure and composition and time-resolved spectroscopy in metals", Appl. Phys. A 76, 303-307, 2003.
13. J. Bonse, S. Baudach, J. Kautek, M. Lenzner, "Femtosecond laser ablation of silicon-modification thresholds and morphology", Appl. Phys. A 74, 19-25, 2002.
14. E.G. Gamaly, A.V. Rode, V.T. Tikhonchuk, B. Luther-Davies, "Electrostatic mechanism of ablation by femtosecond lasers", Appl. Surf. Sci., 8094, 1-6, 2002.
15. A. Luft, U. Franz, A. Emsermann, J. Kaspar, "A study of thermal and mechanical effects on materials induced by pulsed laser drilling", Appl. Phys. A 63, 93-101, 1996.