Rf-sputtering growth of stoichiometric amorphous TeO2 thin films

Crystal Research and Technology

Volumn 40, Issue 10-11, 2005, Pages 1023-1027

  Di Giulio, M ^a   Zappettini, A ^b   Nasi, L ^b   Pietralunga, S M ^c  

^a UNIVERSITY OF SALENTO   (Italy)

^b IMEM CNR   (Italy)

^c CORECOM ^*  (Italy)

Author keywords

RBS; Sputtering; Tellurium oxide; TEM; Thin film

Indexed keywords

AMORPHOUS MATERIALS; SPUTTERING; STOICHIOMETRY; SUBSTRATES; TELLURIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; TRANSPARENCY; X RAY DIFFRACTION;

DEPOSITION PARAMETERS; RBS; SPUTTERING GAS; SUBSTRATE TEMPERATURE; TELLERIUM OXIDE;

THIN FILMS;

EID: 27744459919     PISSN: 02321300     EISSN: None     Source Type: Journal    
DOI: 10.1002/crat.200410479     Document Type: Conference Paper

References (16)

1. T. Yano, J. Fukumoto, and A. Watanabe, J. Appl. Phys. 42, 3674 (1971).
2. I. Abdulhalim, C. N. Pannel, J. Wang, G. Wylangowski, and D. N. Payne, J. Appl. Phys. 75, 519 (1994).
3. G. Ghosh, J. Am. Ceram. Soc. 78, 2828 (1999).
4. S. Wang, E. M. Vogel, and E. Snitzer, Opt. Mat. 3, 187 (1994).
5. E. Marhic, I. Morita, M.-C. Ho, Y. Akasaka, and L. G. Kazovsky, Electronic Letters 35, 2045 (1999).
6. S. Q. Man, E. Y. B. Pun, and P. S. Chung, Opt. Commun. 168, 369 (1999).
7. E. Chierici, M. C. Didavide, A. Moro, O. Rossotto, L. Tallone, and E. Monchiero Proceedings of 2002 IEEE/LEOS Workshop on Fibre and Optical Passive Components, 24, Glasgow, Scotland, (2002).
8. H. Bookey, K. Bindra, A. Kar, B. Wherrett, X. Lui, and A. Jha, Proceedings of 2002 IEEE/LEOS Workshop on Fibre and Optical Passive Components, 29, Glasgow, Scotland, (2002).
9. R. El-Mallawany, Mat. Chem Phys. 58, 93 (1998).
10. R. El-Mallawany, Mat. Chem Phys. 60, 103 (1999).
11. M. Di Giulio, D. Manno, M. C. Nicotra, and M. Re, J. non-cryst. Sol. 155, 67 (1992).
12. M. Di Giulio, M. C. Nicotra, M. Re, R. Rella, and P. Siciliano, Appl. Surf. Sci. 65/66, 313 (1993).
13. M. Di Giulio, G. Micocci, R. Rella, P. Siciliano, and A. Tepore, Phys. Stat. Sol. A 136, K 101 (1993).
14. F. D'Amore, M. Di Giulio, S. M. Pietralunga, A. Zappettini, L. Nasi, V. Rigato, and M. Martinelli, J. Appl. Phys. 94, 1654 (2003).
15. L. Doolittle, Nucl. Instrum. Meth. B9, 334 (1985).
16. M. Mayer, "SIMNRA, a Simulation Program for the Analysis of NRA, RBS and ERDA", Proceedings of the 15th International Conference on the Application of Accelerators in Research and Industry, J. L. Duggan and I.L. Morgan (eds.), American Institute of Physics Conference Proceedings 475, p. 541 (1999).