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Volumn 40, Issue 2-6, 2005, Pages 731-735
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Etching microscopic defects in polycarbonate due to high dose ArF or KrF laser exposure
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON;
CHEMICAL LASERS;
DOSIMETRY;
ETCHING;
EXCIMER LASERS;
EXPOSURE CONTROLS;
LASER THEORY;
MORPHOLOGY;
POLYCARBONATES;
POLYMERS;
ULTRAVIOLET RADIATION;
ELECTROCHEMICAL ETCHING (ECE);
NUCLEAR PARTICLES;
POLYMER SURFACE;
PULSE REPETITION RATES (PRR);
CRYSTAL DEFECTS;
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EID: 27744441627
PISSN: 13504487
EISSN: None
Source Type: Journal
DOI: 10.1016/j.radmeas.2005.06.035 Document Type: Conference Paper |
Times cited : (23)
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References (11)
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