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Volumn 40, Issue 2-6, 2005, Pages 731-735

Etching microscopic defects in polycarbonate due to high dose ArF or KrF laser exposure

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CHEMICAL LASERS; DOSIMETRY; ETCHING; EXCIMER LASERS; EXPOSURE CONTROLS; LASER THEORY; MORPHOLOGY; POLYCARBONATES; POLYMERS; ULTRAVIOLET RADIATION;

EID: 27744441627     PISSN: 13504487     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.radmeas.2005.06.035     Document Type: Conference Paper
Times cited : (23)

References (11)
  • 1
    • 21544466979 scopus 로고
    • Direct etching of polymeric material using a XeCl laser
    • J. Andrew, P. Dyer, D. Forster, and P. Key Direct etching of polymeric material using a XeCl laser Appl. Phys. Lett. 43 1983 717 719
    • (1983) Appl. Phys. Lett. , vol.43 , pp. 717-719
    • Andrew, J.1    Dyer, P.2    Forster, D.3    Key, P.4
  • 4
    • 27744529256 scopus 로고
    • A new vacuum-etched high-transmittance film
    • C. Horwitz A new vacuum-etched high-transmittance film Phys. Lett. 36 1980 727 730
    • (1980) Phys. Lett. , vol.36 , pp. 727-730
    • Horwitz, C.1
  • 5
    • 1042292800 scopus 로고    scopus 로고
    • KrF laser irradiation effects on nuclear track recording properties of polycarbonate
    • B. Jaleh, P. Parvin, K. Mirabaszadeh, and M. Katouzi KrF laser irradiation effects on nuclear track recording properties of polycarbonate Radiat. Meas. 38 2004 173 183
    • (2004) Radiat. Meas. , vol.38 , pp. 173-183
    • Jaleh, B.1    Parvin, P.2    Mirabaszadeh, K.3    Katouzi, M.4
  • 6
    • 36449008344 scopus 로고
    • Formation of surface defects during 248 nm photoablation of polyimide
    • D. Krajnovich, and J. Vazquez Formation of surface defects during 248 nm photoablation of polyimide J. Appl. Phys. 73 1993 3001 3008
    • (1993) J. Appl. Phys. , vol.73 , pp. 3001-3008
    • Krajnovich, D.1    Vazquez, J.2
  • 7
    • 0030563040 scopus 로고    scopus 로고
    • High sensitivity quadrupole mass spectroscopy of neutrals sputtered by UV-laser ablation of polymers
    • S. Lazare, W. Guan, and D. Drilhole High sensitivity quadrupole mass spectroscopy of neutrals sputtered by UV-laser ablation of polymers Appl. Surf. Sci. 96-98 1996 605 610
    • (1996) Appl. Surf. Sci. , vol.96-98 , pp. 605-610
    • Lazare, S.1    Guan, W.2    Drilhole, D.3
  • 11
    • 36549095013 scopus 로고
    • Theory for the etching of organic materials by ultraviolet laser pulses
    • R. Sauerbrey, and G.H. Pettit Theory for the etching of organic materials by ultraviolet laser pulses Appl. Phys. Lett. 55 5 1989 421 423
    • (1989) Appl. Phys. Lett. , vol.55 , Issue.5 , pp. 421-423
    • Sauerbrey, R.1    Pettit, G.H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.