Microwave plasma chemical vapor deposition of cone-like structure of diamond/SiC/Si on Si (100)

Diamond and Related Materials

Volumn 14, Issue 11-12, 2005, Pages 1770-1775

  Yan, Jhih Kun ^a   Chang, Li ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Diamond; Epitaxy; Nucleation; Transmission electron microscopy (TEM)

Indexed keywords

CHEMICAL VAPOR DEPOSITION; PLASMAS; RAMAN SCATTERING; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; TRANSMISSION ELECTRON MICROSCOPY;

CONE-LIKE PARTICLES; MICROWAVE PLASMA CVD; SI SUBSTRATES;

DIAMONDS;

EID: 27744437060     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.09.019     Document Type: Conference Paper

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