Effect of electrode geometry on performance of an EHD thin-film evaporator

Journal of Microelectromechanical Systems

Volumn 14, Issue 5, 2005, Pages 978-986

  Moghaddam, Saeed ^a   Ohadi, Michael M ^b  

^a Advanced Thermal and Environmental Concepts ATEC Inc   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

Electrohydrodynamic (EItD); Electronic cooling; Microfluidic MEMS; Polarization; Thin film evaporator

Indexed keywords

COOLING; DEPOSITION; DIELECTRIC LIQUIDS; ELECTRODES; ELECTROHYDRODYNAMICS; EVAPORATORS; FLUIDICS; HEAT TRANSFER; MICROELECTROMECHANICAL DEVICES; POLARIZATION; SILICA; SILICON WAFERS;

ELECTRODE GEOMETRY; ELECTRONIC COOLING; THIN FILM EVAPORATOR;

THIN FILM DEVICES;

EID: 27644560088     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.851812     Document Type: Article

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