Generic fabriction technology for transparent and suspended microfluidic and nanofluidic channels

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1191-1194

  Hug, Thomas S ^a,b   Biss, Thilo ^a,c   De Rooij, Nico F ^a   Staufer, U ^a  

^a Swiss Center for Electronics   (Switzerland)

^b Helbling Beratung+Bauplanung AG   (Switzerland)

^c Biss+Grolimund AG

Author keywords

Microfluidics; Nanofluidics; Oscillating channels; Scanning force microscopy; Suspended channels

Indexed keywords

MICROFLUIDICS; NANOFLUIDICS; OSCILLATING CHANNELS; SCANNING FORCE MICROSCOPY; SUSPENDED CHANNELS;

ELECTROOSMOSIS; FLUID DYNAMICS; RESONANCE; SCANNING ELECTRON MICROSCOPY; SILICA; SILICON WAFERS; SUSPENSIONS (FLUIDS); TRANSPARENCY;

MICROELECTROMECHANICAL DEVICES;

EID: 27544515608     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1497291     Document Type: Conference Paper

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