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Volumn 1, Issue , 2005, Pages 413-416
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Fabrication of miniaturized electron beam system
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Author keywords
Anodic bonding; e beam lithography; Microcolumn
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Indexed keywords
DIFFRACTION;
ELECTRODES;
GLASS;
MICROELECTROMECHANICAL DEVICES;
SILICON WAFERS;
ANODIC BONDING;
GLASS JIG;
LASER DIFFRACTION IMAGES;
MICROCOLUMN;
ELECTRON BEAM LITHOGRAPHY;
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EID: 27544495097
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (2)
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