A monolithic high-g SOI-MEMS accelerometer for measuring projectile launch and flight accelerations

Proceedings of IEEE Sensors

Volumn 1, Issue , 2004, Pages 296-299

  Davis, Bradford S ^a   Denison, Tim ^b   Kaung, Jinbo ^b  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b ANALOG DEVICES INC   (United States)

Author keywords

Acceleration; Accelerometer; Flight lest; High g; IMU; MEMS; Munition; SOI; Telemetry

Indexed keywords

ACCELERATION; FLIGHT DYNAMICS; MICROELECTROMECHANICAL DEVICES; SENSORS; SILICON ON INSULATOR TECHNOLOGY; TELEMETERING;

FLIGHT TEST; HIGH-G; IMU; MEMS; MUNITION; SOI;

ACCELEROMETERS;

EID: 27544493451     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. T. Brosnihan, et. al., "Embedded Interconnect and Electrical Isolation for High-Aspect-Ratio, SOI Inertial Sensors," The 9th International Conference on Solid-State Sensors and Actuators - Transducers '97, pp. 637-640, June 1997.
2. M. Lemkin, T. Juneau, W. Clark, T. Roessig, and T. Brosnihan, "A Low-noise Digital Accelerometer Integrated Using SOI-MEMS Technology," Transducers '99, pp. 1292-1297, Sendai, Japan, June 7-10, 1999.
3. L. Baxter, Capacitive Sensors: Design and Applications, IEEE Press (1997).
4. D. Hepner, M. Mollis, P. Muller, T. Harkins, G. Borgen, W. D'Amico, B. Davis, and L. Burke, "Aeroballistic Diagnostic Fuze," U.S. Patent 6349652, February 2002.
5. B. Davis, "Advancements in G-Hardened Telemetry Instrumentation for Test and Evaluation of Projectiles," Journal of the International Test and Evaluation Association, Vol. 24, Num. 2, pp 51-56. June/July 2003.
6. T. Harkins, "Understanding Body-Fixed Sensor Output From Projectile Flight Experiments," U.S. Army Research Laboratory Technical Report 3029, Aberdeen Proving Ground, MD, September 2003.