A new ammonia sensor based on a porous SiC membrane

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1832-1835

  Connolly, E J ^a   Timmer, B ^b   Pham, H T M ^a   Groeneweg, J ^a   Sarro, P M ^a   Olthuis, W ^b   French, P J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Al electrodes; NH3 sensor; Porous SiC

Indexed keywords

AL ELECTRODES; ELECTROCHEMICAL ETCHING; NH3 SENSORS; POROUS SIC;

ALUMINUM; ANODIC OXIDATION; CURRENT DENSITY; ELECTROCHEMISTRY; ELECTRODES; ETCHING; FIELD EFFECT TRANSISTORS; PERMSELECTIVE MEMBRANES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POROUS MATERIALS; SILICA; SINGLE CRYSTALS;

CHEMICAL SENSORS;

EID: 27544485423     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1497451     Document Type: Conference Paper

References (5)

1. The International Institute of Ammonia refrigeration, http://www.iiar.org
2. T.T. Groot, Sense of Contact 6, keynote: Sensor Research at Energy research Center Netherlands (ECN), March 2004
3. B.H. Timmer, Amina-chip, Ph.D. Thesis, U. Twente, The Netherlands, 2004
4. A. Lloyd Spetz et al., "Si AND SiC BASED FIELD EFFECT DEVICES", Proc. TAFT'2000, Nancy, France, 27-30 March 2000
5. E.J. Connolly et al., Comparison of porous Si, porous polySi and porous SiC as materials for humidity sensing applications, Sensors & Actuators A99 (2002), pp 25-30.