Micro-patterned electret for high power electrostatic motor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 470-473

  Genda, T ^a   Tanaka, S ^a   Esashi, M ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE TRANSFER; ELECTROSTATIC DEVICES; HYDROPHOBICITY; LEAST SQUARES APPROXIMATIONS; MERCURY (METAL); SURFACE ROUGHNESS; SURFACE TREATMENT; VACUUM;

CHARGE DENSITY; CONTACT ELECTRIFICATION; MICRO-PATTERNED ELECTRET; SURFACE POTENTIAL;

ELECTRETS;

EID: 3042740945     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. C. Livermore, A. Forte, T. Lyszczarz, S. D. Umans and J. H. Lang, "A High-Power MEMS Electric Induction Motor," in Proc. Solid-State Sensor, Actuator and Microsystems Workshop, pp.251-254, Hilton Head Island, South Carolina, 2002-6
2. T. Genda, S. Tanaka and M. Esashi, "High Power Electrostatic Motor and Generator using Electrets," in Proc. The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '03), Vol. 1, pp. 492-495, Boston, 2003-6
3. T. Genda, S. Tanaka and M. Esashi, "Design of High Power Electrostatic Motor and Generator Using Electrets," IEEJ Trans. on Sensors and Micromachines, Vol. 123, No. 9, pp. 331-339, 2003, (in Japanese)
4. J. A. Voorthuyzen, W. Olthuis and P. Bergveld, "Research and Development of Miniaturized Electrets," IEEE Trans. on Electrical Insulation, Vol. 24, No. 2, pp. 255-266, 1989
5. 2 electrets," J. Appl. Phys., Vol. 74, No. 12, pp. 7269-7274, 1993
6. A. M. El-Kazzaz and A. C. Rose-Innes, "The use of liquid metals for contact-charging experiments," J. Phys. D: Appl. Phys., Vol. 20, No. 12, pp. 1616-1622, 1987