Fabrication of nanometer-scale mechanical devices incorporating individual multiwalled carbon nanotubes as torsional springs

Applied Physics Letters

Volumn 82, Issue 5, 2003, Pages 805-807

  Williams, P A ^a   Papadakis, S J ^a   Patel, A M ^b   Falvo, M R ^b   Washburn, S ^a,b   Superfine, R ^a,b  

^a University of North Carolina at Chapel Hill   (United States)

^b UNIVERSITY OF NORTH CAROLINA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SILICA; TORSIONAL STRESS;

TORSIONAL SPRINGS;

CARBON NANOTUBES;

EID: 0037415839     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1538346     Document Type: Article

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