Tensile testing of MEMS materials

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1953-1956

  Tsuchiya, Toshiyuki ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Electrostatic grip; Micro material characterization; Tensile test; Thin film

Indexed keywords

ELECTROSTATIC GRIPS; MECHANICAL STRUCTURES; MICRO-MATERIAL CHARACTERIZATION; TENSILE TESTS;

CHARACTERIZATION; ELECTROSTATICS; RELIABILITY; SILICA; SILICON NITRIDE; SINGLE CRYSTALS; STATISTICAL METHODS; TENSILE TESTING; THICK FILMS; THIN FILMS;

MICROELECTROMECHANICAL DEVICES;

EID: 27544434094     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1497482     Document Type: Conference Paper

References (7)

1. T. Tsuchiya, O. Tabata, J. Sakata, and Y. Taga, "Tensile Testing of polycrystalline silicon thin films using electrostatic force grip", Trans. of IEEJ Sensors and Micromachines Soc., Vol. 116-E, No. 10, pp. 441-446, Dec 1996.
2. T. Tsuchiya, M. Hirata, N. Chiba, R. Udo, Y. Yoshitomi, T. Ando, K. Sato, K. Takashima, Y. Higo, Y. Saotome, H. Ogawa, and K. Ozaki, "Cross comparison of thin film tensile-testing methods examined with single-crystal silicon, polysilicon, nickel, and titanium films" Proc. of IEEE The 16th International Conference on Micro Electro Mechanical Systems, Kyoto, Japan, Jan. 19-23, 2003, pp. 666-669.
3. T. Tsuchiya, J. Sakata, M. Shikida, and K. Sato, "Tensile Test of Bulk- and Surface-Micromachined 0.1-μm Thick Silicon Film using Electrostatic Force Grip System," Mat. Res. Soc. Symp. Proc. Vol. 687, Boston, MA, Nov. 26-30, 2001 B5.45.
4. T. Tsuchiya, O. Tabata, J. Sakata, and Y. Taga, Specimen Size Effect on Tensile Strength of Surface Micromachined Polycrystalline Silicon Thin Films, J. of Micro ElectroMechinical Systems 7, 1: 106-113 (1998).
5. T. Tsuchiya, J. Sakata, and Y. Taga, "Tensile strength and fracture toughness of surface micromachined polycrystalline silicon thin films prepared under various conditions," Mat. Res. Soc. Symp. Proc. Vol. 505, Boston, MA, Dec. 2-5, 1997, pp. 285-290.
6. T. Tsuchiya and J. Sakata, "Tensile testing of thin films using electrostatic force grip," ASTM STP 1413: Mechanical Properties of Structural Films, 214-228 (2001).
7. T. Tsuchiya, M. Hirata, and N. Chiba, "Young's modulus, Fracture Strain, and Tensile Strength of Sputtered Titanium Thin Films," Thin Solid Films, in press.