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Volumn 240, Issue 1-2, 2005, Pages 303-307
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RBS, ERDA and XPS study of Ag and Cu diffusion in PET and PI polymer foils
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Author keywords
ERDA; Metal diffusion; Polymer metal intermixing; RBS
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
COPPER;
DIODES;
INTERFACES (MATERIALS);
POLYETHYLENE TEREPHTHALATES;
POLYIMIDES;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SILVER;
SPUTTER DEPOSITION;
THIN FILMS;
X RAY PHOTOELECTRON SPECTROSCOPY;
CATHODE SPUTTERING;
ERDA;
METAL DIFFUSION;
POLYMER METAL INTERMIXING;
DIFFUSION;
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EID: 27444432171
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2005.06.157 Document Type: Conference Paper |
Times cited : (12)
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References (9)
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