Safety relevant microsystems for automotive applications

Microsystem Technologies

Volumn 7, Issue 5-6, 2002, Pages 244-248

  Seidel, H ^a   Aikele, M ^a   Rose, M ^a   Toelg, S ^a  

^a Conti Temic Microelectronic GmbH ^*  (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ACCIDENT PREVENTION; JITTER; MICROMACHINING; SENSORS; SINGLE CRYSTALS;

ANGULAR RATE SENSOR; LATERAL INTEGRATED SURFACE MICROMACHINED ACCELEROMETER (LISA); MICROSYSTEMS; RATIO STRUCTURES;

AUTOMOTIVE ENGINEERING;

EID: 27344454640     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420100105     Document Type: Article

References (7)

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2. Toelg S; Sooriakumar K; Loh YH; Sridhar U; Lau CH (1999) A novel technology platform for versatile micromachined accelerometers. In: Ricken DE; Gessner W (eds) Advanced Microsystems for Automotive Applications, Springer, Berlin, pp. 225-237
3. Seidel H; Fritsch U; Gottinger R; Schalk J (1995) A piezoresistive silicon acclerometer with monolithically integrated CMOS-circuitry. In: Proc Transducers 95, June 25-29, Stockholm pp. 597-600
4. Aikele M; Bauer K; Ficker W; Neubauer F; Prechtel U; Schalk J; Seidel H (2000) Resonant accelerometer with self-test. In: Proc Eurosensors XIV, Copenhagen, pp. 217-218
5. Voss R; Bauer K; Ficker W; Gleissner T; Kupke W; Rose M; Sassen S; Schalk J; Seidel H; Stenzel E (1997) Silicon angular rate sensor for automotive applications with piezoelectric drive and piezoresistive read-out. In: Proc Transducers'97, June 16-19, Chicago, pp. 879-882
6. Rose M (1998) Entwicklung eines mikromechanischen Drehratensensors aus Silizium. Doctoral Thesis, Technical University Berlin
7. Sassen S; Voss R; Schalk J; Stenzel E; Gleissner T; Gruenberger R; Nuscheier F; Neubauer F; Ficker W; Kupke W; Bauer K; Rose M (2000) Robust and selfstable silicon tuning fork gyroscope with enhanced resolution. In: Krüger S; Gessner W (eds) Advanced Microsystems for Automotive Applications, Springer, Berlin, Germany, pp. 233-243