Electrical breakdown characteristics of an atmospheric pressure rf capacitive plasma source

Physics of Plasmas

Volumn 12, Issue 9, 2005, Pages 1-8

  Li, Shou Zhe ^a   Kang, Jung G ^a   Uhm, Han S ^a  

^a Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; DATA ACQUISITION; DIFFUSION; ELECTRODES; HELIUM; MATHEMATICAL MODELS;

COAXIAL CYLINDERS; ELECTRICAL BREAKDOWN VOLTAGE; HELIUM GAS; RF CAPACITIVE PLASMA SOURCE;

PLASMAS;

EID: 27344435069     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2035447     Document Type: Article

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