Silicon MEMS probe using a simple adhesive bonding process for permittivity measurement

Journal of Micromechanics and Microengineering

Volumn 15, Issue 11, 2005, Pages

  Kim, Jung Mu ^a   Oh, Dong Hoon ^b   Yoon, Jeonghoon ^a   Cho, Sungjoon ^a   Kim, Namgon ^a   Cho, Jeiwon ^a   Kwon, Youngwoo ^a   Cheon, Changyul ^b   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

^b University of Seoul   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVES; BONDING; ELECTRIC VARIABLES MEASUREMENT; FREQUENCIES; LASER APPLICATIONS; PERMITTIVITY; PROBES; SEMICONDUCTING SILICON;

ADHESIVE BONDING; MICROWAVE PERMITTIVITY; PERMITTIVITY MEASUREMENTS; SILICON SUBSTRATES;

MICROELECTROMECHANICAL DEVICES;

EID: 27144556942     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/11/N01     Document Type: Article

References (9)

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