Permittivity measurements up to 30 GHz using micromachined probe

Journal of Micromechanics and Microengineering

Volumn 15, Issue 3, 2005, Pages 543-550

  Kim, Jung Mu ^a   Oh, Dong Hoon ^b   Park, Jae Hyoung ^a   Cho, Jei Won ^a   Kwon, Youngwoo ^a   Cheon, Changyul ^b   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

^b University of Seoul   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BRASS; CALIBRATION; EVAPORATION; JIGS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PROBES; RADIATION EFFECTS; TISSUE;

BENZO CYCLO BUTENE (BCB) LAYERS; BIOLOGICAL APPLICATIONS; BIOLOGICAL PROPERTIES; THERMAL EVAPORATION;

PERMITTIVITY MEASUREMENT;

EID: 15544362536     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/3/015     Document Type: Article

References (15)

1. Gabriel C, Gabriel S and Corthout E 1996 The dielectric properties of biological tissues: I. Literature survey Phys. Med. Biol. 41 2231-49
2. Gabriel S, Lau R W and Gabriel C 1996 The dielectric properties of biological tissues: II Measurements in the frequency range 10 Hz to 20 GHz Phys. Med. Biol. 41 2251-69
3. Duhamel F, Huynen I and Vorst A V 1997 Measurements of complex permittivity of biological and organic liquids up to 110 GHz IEEE MTT-S Dig. (Piscataway, NJ: IEEE) pp 107-10
4. Keam Holdem Associates Ltd 2001 In vivo measurement of liver fat using microwave reflectometry Application Note KHA0429
5. Athey T W, Stuchly M A and Stuchly S S 1982 Measurement of radio frequency permittivity of biological tissues with an open-ended coaxial line: Part I IEEE Trans. Microw. Theory Tech. 82 82-6
6. Stuchly M A, Athey T W, Samaras G M and Taylor G E 1982 Measurement of radio frequency permittivity of biological tissues with an open-ended coaxial line: Part II - Experimental results IEEE Trans. Microw. Theory Tech. 82 87-92
7. Wei Y Z and Sridhar S 1989 Technique for measuring the frequency-dependent complex dielectric constants of liquids up to 20 GHz Rev. Sci. Instrum. 60 3041-6
8. Wei Y Z and Sridhar S 1991 Radiation-corrected open-ended coax line technique for dielectric measurements of liquids up to 20 GHz IEEE Trans. Microw. Theory Tech. 39 526-31
9. Nyshadham A, Sibbald C L and Stuchly S S 1992 Permittivity measurements using open-ended sensors and reference liquid calibration - an uncertainty analysis IEEE Trans. Microw. Theory Tech. 40 305-13
10. Hagl D M, Popovic D, Hagness S C, Booske J H and Okoniewski M 2003 Sensing volume of open-ended coaxial probes for dielectric characterization of breast tissue at microwave frequencies IEEE Trans. Microw. Theory Tech. 51 1194-206
11. Hoshina S, Kanai Y and Miyakawa M 2001 A numerical study of the measurement region of an open-ended coaxial probe used for complex permittivity measurement IEEE Trans. Magn. 37 3311-4
12. http://www.dow.com
13. Kim K I, Kim J M, Kim J M, Park J H, Back C W and Kim Y K 2004 Photolithography of thick BCB layer and sealing test for MEMS packaging The 11th Korean Conf. on Semiconductors vol 1 pp 273-4
14. Jeong E M, Jeong G S, Kwon Y W and Cheon C 2003 Permittivity measurement in low frequency range using open-ended coaxial probe with various calibration liquids Asia-Pacific Microwave Conf. vol 3 pp 2036-9
15. Hwang H, Yim J, Cho J W, Cheon C and Kwon Y 2003 110 GHz broadband measurement of permittivity on human epidermis using 1 mm coaxial probe 2003 IEEE MTT-S Dig. (Piscataway; NJ: IEEE) pp 399-402