A comparative study of micropipe decoration and counting in conductive and semi-insulating silicon carbide wafers

Journal of Electronic Materials

Volumn 34, Issue 10, 2005, Pages 1342-1348

  Wan, Jianwei ^a   Park, Seung Ho ^a   Chung, Gilyong ^a   Loboda, Mark ^a  

^a DOW CHEMICAL COMPANY   (United States)

Author keywords

Micropipe; Potassium oxide (KOH) etching; Silicon carbide (SiC)

Indexed keywords

ETCHING; IMAGING TECHNIQUES; MORPHOLOGY; POLISHING; POTASSIUM COMPOUNDS; SILICON CARBIDE; SILICON WAFERS;

MICROPIPE; POTASSIUM OXIDE (KOH) ETCHING; SCREW DISLOCATIONS;

DISLOCATIONS (CRYSTALS);

EID: 27144462059     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-005-0260-9     Document Type: Article

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