Study on eight-pass dual-frequency laser interferometer with nanometer precision

Chinese Optics Letters

Volumn 3, Issue 9, 2005, Pages 513-515

  Gao, Haijun ^a   Cheng, Zhaogu ^a   Ning, Zhigao ^a   Cui, Pinjing ^a   Huang, Huijie ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

INFORMATION TECHNOLOGY; MEASUREMENT ERRORS; MEASUREMENT THEORY; OPTICAL INSTRUMENTS;

COMMERCIAL INTERFEROMETERS; EIGHT PASS DUAL FREQUENCY LASER INTERFEROMETER; EIGHT PASS OPTICAL SUBDIVISION TECHNOLOGY; NANOMETER PRECISION; POLARIZING BEAM SPLITTER (PBS); REPEATABILITY; STATIC POSITIONING ERROR MEASURING METHOD;

INTERFEROMETERS;

EID: 26844572269     PISSN: 16717694     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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