Viscoelastic characterization of low-dielectric constant SiLK films using nanoindentation in combination with finite element modeling

Journal of Electronic Packaging

Volumn 127, Issue 3, 2005, Pages 276-285

  Den Toonder, J M J ^a   Ramone, Y ^a   Van Dijken, A R ^a   Beijer, J G J ^a   Zhang, G Q ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; INTEGRATED CIRCUITS; NANOTECHNOLOGY; THIN FILM CIRCUITS; VISCOELASTICITY;

HALF-SPLIT-BAND; SILICON SUBSTRATE; SILK FILM; STRAIN LEVELS;

DIELECTRIC MATERIALS;

EID: 26844520010     PISSN: 10437398     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1938990     Document Type: Article

References (13)

1. SiLK is a trademark of the DOW Chemical Company.
2. Townsend, P. H., Martin, S. J., Godschalx, J., Romer, D. R., Smith, Jr., D. W., Castillo, D., DeVries, R., Buske, G., Rondan, N., Froelicher, S., Marschall, J., Schaffer, E. O., and Im, J.-H., 1997, "SiLK Polymer Coating With Low Dielectric Constant and High Thermal Stability for ULSI Interlayer Dielectric," Mater. Res. Soc. Symp. Proc., 476, pp. 9-17.
3. Malzbender, J., den Toonder, J. M. J., Balkenende, A. R., and de With, G., 2002, "Measuring Mechanical Properties of Coatings: A Methodology Applied to Nano-Particle-Filled Sol-Gel Coatings," Mater. Sci. Eng., R., 267, pp. 1-57.
4. Johnson, K. L., 1985, Contact Mechanics, Cambridge University Press.
5. Lee, E. H., and Radok, J. R. M., 1960, "The Contact Problem for Viscoelastic Bodies," ASME J. Appl. Mech., 30, pp. 438-444.
6. Ting, T. C. T., 1966, "The Contact Stresses Between a Rigid Indenter and a Viscoelastic Half-Space," ASME J. Appl. Mech., 33, pp. 845-854.
7. Ting, T. C. T., 1968, "Contact Problems in the Linear Theory of Viscoelasticity," ASME J. Appl. Mech., 35, pp. 248-254.
8. Cheng, L., Xia, X., Yu, W., Scriven, L. E., and Gerberich, W. W., 2000, "Flat-Punch Indentation of Viscoelastic Material," J. Polym. Sci., Part B: Polym. Phys., 38, pp. 10-22.
9. Loubet, J. L., Oliver, W. C., and Lucas, B. N., 2000, "Measurement of the Loss Tangent of Low-Density Polyethylene With a Nanoindentation Technique," J. Mater. Res., 15, pp. 1195-1198.
10. van Melick, H., van Dijken, A., den Toonder, J., Govaert, L., and Meijer, H., 2002, "Near-Surface Mechanical Properties of Amorphous Polymers," Philos. Mag. A, 82, pp. 2093-2102.
11. Tschoegl, N. W., 1989, The phenomenological theory of linear viscoelastic behavior, Springer-Verlag.
12. Malzbender, J., de With, G., and den Toonder, J. M. J., 2000, "Determination of the Elastic Modulus and Hardness of Sol-Gel Coatings on Glass: Influence of Indenter Geometry," Thin Solid Films, 372, pp. 134-143.
13. Tabor, D., 1951, The Hardness of Metals, Oxford University Press.