D-microGeiger: A microfabricated beta-particle detector with dual cavities for energy spectroscopy

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 622-625

  Wilson, Chester G ^a   Eun, Christine K ^a   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BETA PARTICLES; ELECTRON CASCADES; ENERGY SPECTROSCOPY; GLASS BARRIERS;

ELECTRODES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RADIATION EFFECTS; SILICON WAFERS; SPECTROSCOPIC ANALYSIS; VOLTAGE CONTROL;

PARTICLE DETECTORS;

EID: 26844495740     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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9. C.G. Wilson, Y.B. Gianchandani, "MicroGeiger: A Microfabricated Gas-Based Beta Particle Detector," Solid-State Sensors & Actuators Workshop, Hilton Head Island, South Carolina, June '04, pp. 53-56