A monolithic integrated array of out-of-plane hot-wire flow sensors and demonstration of boundary-layer flow imaging

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 299-302

  Chen, Jack ^a   Engel, Jonathan ^a   Chen, Nannan ^a   Liu, Chang ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANEMOMETERS; BOUNDARY LAYER FLOW; IMAGE ANALYSIS; JUNCTION GATE FIELD EFFECT TRANSISTORS; OPERATIONAL AMPLIFIERS; SENSORS;

AIRFLOW; OUT-OF-PLANE HOT-WIRE FLOW SENSORS; TEMPERATURE MODES; THREE-DIMENSIONAL ASSEMBLY;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 26844479210     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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