Studies for quality and thickness uniformity of diamond thick film synthesized by the EA-CVD method

Xinxing Tan Cailiao/New Carbon Materials

Volumn 20, Issue 3, 2005, Pages 270-273

  Lu, Xian Yi ^a   Jin, Zeng Sun ^a   Yang, Guang Liang ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

Diamond thick film; Electron assisted chemical vapor deposition; Uniformity of quality and thickness

Indexed keywords

ABRASIVES; CHEMICAL VAPOR DEPOSITION; CONCENTRATION (PROCESS); ELECTRONS; GASES; GLOW DISCHARGES; GRINDING WHEELS; METHANE; PLASMAS; PRESSURE; SUBSTRATES; THERMAL CONDUCTIVITY; THICK FILMS;

ABRASIVENESS RATIO; DIAMOND THICK FILM; ELECTRON ASSISTED CHEMICAL VAPOR DEPOSITION; FILAMENT SUBSTRATE DISTANCE;

DIAMOND FILMS;

EID: 26644452550     PISSN: 20971605     EISSN: 18725805     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

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