Absolute calibration of step height by a novel interferometric microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5776, Issue , 2005, Pages 121-129

  Doi, Takuma ^a   Kurosawa, Tomizo ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Interferometric microscope; Numerical aperture correction; Phase shifting interferometry, standard of length; Step height

Indexed keywords

ERROR ANALYSIS; ESTIMATION; INTERFEROMETRY; LIGHT INTERFERENCE; LIGHT SOURCES; LIGHTING; OPTICAL VARIABLES MEASUREMENT;

INTERFEROMETRIC MICROSCOPES; NUMERICAL APERTURE CORRECTION; PHASE-SHIFTING INTERFEROMETRY (PSI), STANDARD OF LENGTH; STEP HEIGHT;

MICROSCOPES;

EID: 26444551659     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.611641     Document Type: Conference Paper

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